氣載微業潔凈等級（ISO 14644-1）

SO Classification Number

Maxlmum Concentrationlimit(particles/M³of air)
equal to or larger than considered sizes shown bolew

0.1um

0.2um

0.3um

0.5um

1um

5um

ISI01

10

2

ISI02

100

24

10

4

ISI03

1,000

237

102

35

ISI04

10,000

2,370

1020

352

83

ISI05

100,000

237,000

10,2000

3,520

832

29

ISI06

1,000,000

237,000

102,000

35,5200

8,320

293

ISI07

352,000

83,200

2,930

ISI08

3,520,000

832,000

29,300

ISI09

35,200,000

8,320,000

293,000